Semiconductor device including current compensator

ABSTRACT

The present technology relates to an electronic device, and more particularly, to a semiconductor device. The semiconductor device includes a peripheral circuit, a power output line connected to the peripheral circuit and configured to transmit an operation voltage to the peripheral circuit, a current compensator including an OP-amplifier connected to the power output line, and a capacitor connected between an output terminal of the OP-amplifier and the power output line.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based on and claims priority from Korean PatentApplication No. 10-2012-0141723, filed on Dec. 7, 2012, with the KoreanIntellectual Property Office, the disclosure of which is incorporatedherein in its entirety by reference.

BACKGROUND

1. Field

The present invention generally relates to an electronic device, andmore particularly, to a semiconductor device.

2. Discussion of Related Art

A semiconductor memory device is a memory device implemented by using asemiconductor, such as silicon (Si), germanium (Ge), gallium arsenide(GaAs), and indium phosphide (InP). Semiconductor memory device isgenerally divided into a volatile memory device and a nonvolatile memorydevice.

The volatile memory device is a memory device in which when power isremoved, stored data dissipates. Examples of a volatile memory deviceinclude a Static RAM (SRAM), a Dynamic RAM (DRAM), a Synchronous DRAM(SDRAM), and the like. The nonvolatile memory device is a memory devicein which even though power is removed, stored data is maintained.Examples of a nonvolatile memory device include a Read Only Memory(ROM), a Programmable ROM (PROM), an Electrically Programmable ROM(EPROM), an Electrically Erasable and Programmable ROM (EEPROM), a flashmemory, a Phase-change RAM (PRAM), a Magnetic RAM (MRAM), a ResistiveRAM (RRAM), a Ferroelectric RAM (FRAM), and the like. The flash memoryis generally divided into a NOR type and a NAND type.

When the semiconductor memory device is driven, excessive current isgenerated inside the semiconductor memory device, enough so that anoperation voltage of the semiconductor memory device may be unstable.This may occur due to excessive consumption of current for a specifictime interval by a peripheral circuit within the semiconductor memorydevice. Accordingly, when the current is excessively consumed, there isa greater demand for additional current, other than for operation power.

SUMMARY

The present invention has been made in an effort to decrease the area ofa semiconductor device despite demands for additional current.

An embodiment of the present invention provides a semiconductor deviceincluding: a peripheral circuit; a power output line connected to theperipheral circuit, and configured to transmit an operation voltage tothe peripheral circuit; and a current compensator including anOP-amplifier connected to the power output line, and a capacitorconnected between an output terminal of the OP-amplifier and the poweroutput line.

According to an embodiment of the present invention, the semiconductordevice may further include a control logic, configured to control theperipheral circuit, in which the control logic is configured to enable acompensation control signal for a predetermined time interval, and theOP-amplifier activated according to the compensation control signal.

According to an embodiment of the present invention, the peripheralcircuit may include an internal voltage generation unit configured toreceive an external power voltage and generate an internal power voltageby using the external power voltage. The internal power voltage may beprovided to the power output line as the operation voltage.

According to an embodiment of the present invention, the semiconductordevice may further include a memory cell array driven by the peripheralcircuit, in which the peripheral circuit may include: a read and writecircuit connected to the memory cell array through bit lines andoperated by using the operation voltage received through the poweroutput line; a voltage pump configured to generate high voltages byusing the operation voltage provided through the power output line; anaddress decoder connected to the memory cell array through word linesand configured to switch the high voltages to the word lines; and acontrol logic configured to control the read and write circuit, thevoltage pump, and the address decoder. The current compensator may beadjacently disposed to the voltage pump or to the read and writecircuit.

Another embodiment of the present invention provides a semiconductordevice including: a peripheral circuit; a first power output lineconfigured to transmit an external power voltage to the peripheralcircuit; an internal voltage generation unit configured to generate aninternal power voltage by using the external power voltage; a secondpower output line configured to transmit the internal power voltage tothe peripheral circuit; and a first current compensator including afirst OP-amplifier connected to the first power output line and a firstcapacitor connected between an output terminal of the first OP-amplifierand the second power output line.

According to an embodiment of the present invention, the semiconductordevice may further include a second current compensator including asecond OP-amplifier connected to the second power output line and asecond capacitor connected between an output terminal of the secondOP-amplifier and the first power output line.

According to an embodiment of the present invention, the semiconductordevice may further include: a third current compensator including athird OP-amplifier connected to the first power output line and a thirdcapacitor connected between an output terminal of the third OP-amplifierand the first power output line; and a fourth current compensatorincluding a fourth OP-amplifier connected to the second power outputline and a fourth capacitor connected between an output terminal of thefourth OP-amplifier and the second power output line.

According to various embodiments of the present invention, asemiconductor device having a decreased area despite demands foradditional current is provided.

The foregoing summary is illustrative only and is not intended to be inany way limiting. In addition to the illustrative aspects, embodiments,and features described above, further aspects, embodiments, and featureswill become apparent by reference to the drawings and the followingdetailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present inventionwill become more apparent to those of ordinary skill in the art bydescribing in detail embodiments thereof with reference to the attacheddrawings in which:

FIG. 1 is a block diagram illustrating a semiconductor device accordingto an embodiment of the present invention;

FIG. 2 is a block diagram illustrating a peripheral circuit and acurrent compensation circuit according to an embodiment of the presentinvention;

FIG. 3 is a block diagram illustrating a voltage generator, a read andwrite circuit, and first and second current compensators according toanother embodiment of the present invention;

FIG. 4 is a block diagram illustrating a peripheral circuit and acurrent compensation circuit according to yet another embodiment of thepresent invention;

FIG. 5 is a diagram illustrating a relation between current generated inthe semiconductor device and a compensation control signal;

FIG. 6 is a diagram illustrating an example of a relation betweencurrent generated in the semiconductor device and a compensation controlsignal when an program operation is performed; and

FIG. 7 is a diagram illustrating an example of a relation betweencurrent generated in the semiconductor device and a compensation controlsignal when a read operation is performed.

DETAILED DESCRIPTION

Hereinafter, various embodiments of the present invention will bedescribed with reference to the accompanying drawings in detail.However, the present invention is not limited to the embodimentsdisclosed below and may be implemented in various forms, and the scopeof the present invention is not limited to the following embodiments.Rather, the embodiments are provided to more fully disclose the presentinvention and to completely transfer the spirit of the present inventionto those skilled in the art to which the present invention pertains, andthe scope of the present invention should be understood by the claims ofthe present invention.

Throughout this specification and the claims that follow, when it isdescribed that an element is “coupled” to another element, the elementmay be “directly coupled” to the other element or “indirectly coupled”to the other element with a third element interposed therebetween. Inaddition, unless explicitly described to the contrary, the word“comprise” and variations, such as “comprises” or “comprising”, will beunderstood to imply the inclusion of stated elements but not theexclusion of any other elements.

Referring to FIG. 1, the semiconductor device 100 may include a memorycell array 110, a peripheral circuit 120, a current compensation circuit130, and a control logic 140.

The memory cell array 110 may include a plurality of memory blocks BLK1to BLKz (not shown), which may be connected to an address decoder 121through word lines WL. The plurality of memory blocks BLK1 to BLKz mayalso be connected to a read and write circuit 123 through bit lines BL.Each of the plurality of memory blocks BLK1 to BLKz may include aplurality of memory cells, each of which may be nonvolatile.

The peripheral circuit 120 may be configured so as to drive the memorycell array 110. The peripheral circuit 120 may include an addressdecoder 121, a voltage generator 122, and a read and write circuit 123.

The address decoder 121 may be connected to the memory cell array 110through the word lines WL and configured to be operated in response tocontrol of the control logic 140. The address decoder 121 may receive anaddress ADDR from an input/output buffer (not shown) inside thesemiconductor device 100.

The address decoder 121 may be configured so as to decode a blockaddress among the received addresses ADDR. The address decoder 121 mayselect at least one memory block according to a decoded block address.

The address decoder 121 may also be configured so as to decode a rowaddress among the received addresses ADDR. The address decoder 121 maybe configured so as to select one word line by switching high voltagesfrom the voltage generator 122 to the word lines WL according to thedecoded row address.

The address decoder 121 may be configured so as to decode a columnaddress among the received addresses ADDR. The address decoder 121 maytransmit the decoded column address to the read and write circuit 123.

A program of the semiconductor device 100 may be performed in the unitof a page. The address ADDR received when a program is requested mayinclude a block address, a row address, and a column address. Theaddress decoder 121 may select one memory block and one word lineaccording to the block address and the row address. The column addressmay be decoded by the address decoder 121 to be provided to the read andwrite circuit 123.

The address decoder 121 may include a block decoder, a row decoder, acolumn decoder, and an address buffer.

The voltage generator 122 may include an internal voltage generationunit 210 and a voltage pump 220. The internal voltage generation unit210 and the voltage pump 220 may be operated in response to the controlof the control logic 140.

The internal voltage generation unit 210 may be configured so as toreceive a power voltage provided from an external source (hereinafter,an external power voltage), and generate an internal power voltage. Forexample, the internal voltage generation unit 210 may be configured soas to regulate the external power voltage to generate the internal powervoltage having a stable voltage.

The voltage pump 220 may be configured so as to generate a plurality ofhigh voltages by using at least one of the external power voltage andthe internal power voltage. The voltage generator 122 may include aplurality of pumping capacitors, and may generate a plurality of highvoltages by selectively activating the plurality of pumping capacitors.The plurality of generated high voltages may be provided to the addressdecoder 121, which then may drive the word lines WL by using theplurality of provided high voltages.

The read and write circuit 123 may be connected to the memory cell array110 through the bit lines BL and operated in response to the controllogic 140.

In a program operation, the read and write circuit 123 may exchange dataDATA with an input/output buffer (not shown) of the semiconductor device100. The read and write circuit 123 may receive data DATA to beprogrammed. Then, the read and write circuit 123 may transmit the dataDATA to be programmed to the bit lines indicated by the decoded columnaddress among the bit lines BL whenever a program pulse is applied tothe selected word line. The transmitted data DATA may be programmed intothe memory cells connected to the selected word line. When a readoperation is performed, the read and write circuit 123 may read datafrom the memory cells of the selected word line through the bit linesindicated by the decoded column address among the bit lines BL, andoutput the read data DATA. For the aforementioned operation of the readand write circuit 123, at least one of the external power voltage andthe internal power voltage may be provided to the read and write circuit123.

In an embodiment of the present invention, the read and write circuit123 may include page buffers, a column selection circuit, and the like.

The current compensation circuit 130 may assist at least one of theexternal power voltage and the internal power voltage. The currentcompensation circuit 130 may be configured so as to supply current to atleast one element inside the semiconductor device 100 when peak currentis generated inside the semiconductor device 100. This will be describedin more detail with reference to FIG. 2.

The control logic 140 may be connected to the peripheral circuit 120 andthe current compensation circuit 130. The control logic 140 may receivea command CMD from the input/output buffer (not shown) of thesemiconductor device 100. The control logic 140 may be configured so asto control the peripheral circuit 120 and the current compensationcircuit 130 in response to the command CMD.

The control logic 140 may transmit a compensation control signal CMP tothe current compensation circuit 130. The control logic 140 may activatethe compensation control signal CMP for a predetermined time interval.For example, the control logic 140 may activate the compensation controlsignal CMP for a predetermined time intervals when the program operationis performed, and activate the compensation control signal CMP for apredetermined time interval when the read operation is performed.

Referring to FIG. 2, the peripheral circuit 120 and the currentcompensation circuit 130 may be connected between a power output line PLand a ground line GND. The power output line PL may be configured as totransmit an operation voltage of the peripheral circuit 120. The poweroutput line PL may transmit the internal power voltage from the internalvoltage generation unit 210, and the transmitted internal power voltagemay be used as the operation voltage of the peripheral circuit 120. Inanother embodiment of the present invention, the power output line PLmay transmit the external power voltage from the internal voltagegeneration unit 210, and the transmitted external power voltage may beused as the operation voltage of the peripheral circuit 120.

The current compensation circuit 130 may be configured so as to providecurrent to the power output line PL when the peak current is generatedinside the semiconductor device 100 and the voltage of the power outputline PL is stable. The current compensation circuit 130 may include anOP-amplifier OPA and a capacitor C.

The OP-amplifier OPA may be connected to the power output line PL, wherean inverse terminal (−) of the OP-amplifier OPA may be connected to thepower output line PL, and a non-inverse terminal (+) of the OP-amplifierOPA may be connected to the ground line GND. An output terminal of theOP-amplifier OPA may be connected to a capacitor C. The OP-amplifier OPAmay be activated or deactivated in response to the compensation controlsignal CMP received from the control logic 140 (see FIG. 1).

The capacitor C may be connected between the output terminal of theOP-amplifier OPA and the power output line PL. and may be configuredwith a combination of a plurality of MOS transistors.

A quantity of current provided to the power output line PL isproportional to an efficiency value determined by a gain of theOP-amplifier OPA and capacitance of the capacitor C. For example, theefficiency value may be calculated as represented in Equation 1.CC=(1+A)×CL  Equation 1

Referring to FIG. 1, the efficiency value CC may be calculated bymultiplying a value obtained by adding 1 to the gain A of theOP-amplifier OPA by the capacitance CL of the capacitor C. Then, thequantity of current provided to the power output line PL may beproportional to the efficiency value CC.

For example, when it is assumed that the gain A of the OP-amplifier OPAis 100, and the capacitance CL of the capacitor C is 10 pF, theefficiency value CC is about 1 nF. When it is assumed that only thecapacitor is connected between the power output line PL and the groundline GND instead of the current compensation circuit 130 for the sameeffect, a capacitor having capacitance of 1 nF is demanded. In order forthe capacitor to have high capacitance, a large area may be required.

According to an embodiment of the present invention, the currentcompensation circuit 130 including the OP-amplifier OPA and thecapacitor C is provided to decrease the area of the semiconductor device100.

In FIG. 1, for convenience, the voltage generator 122 and the read andwrite circuit 123 in the peripheral circuit 120 are only illustrated.

Referring to FIG. 3, more detail is provided for the voltage generator122, the read and write circuit 123, and the first and second currentcompensators 131 and 132 connected between the power output line PL andthe ground line GND.

The power output line PL may transmit an internal power voltagegenerated in the internal voltage generation unit 210. As anotherexample, the power output line PL may transmit the external powervoltage.

The first and second current compensators 131 and 132 may be included inthe current compensation circuit 130 of FIG. 1. The first and secondcurrent compensators 131 and 132 may be configured so as to providecurrent to the power output line PL when a peak current is generatedinside the semiconductor device 100. The first and second currentcompensators 131 and 132 may be operated in response to first and secondcompensation control signals CMP1 and CMP2 from the control logic 140(see FIG. 1), respectively. The compensation control signals CMP1 andCMP2 may be included in the compensation control signal CMP of FIG. 1,and may be individually controlled by the control logic 140.

The first current compensator 131 may include a first OP-amplifier OPA1connected to the power output line PL, and a first capacitor C1connected between the first OP-amplifier OPA1 and the power output linePL. The second current compensator 132 may include a second OP-amplifierOPA2 connected to the power output line PL, and a second capacitor C2connected between the second OP-amplifier OPA2 and the power output linePL.

The read and write circuit 123 and the voltage pump 220 in theperipheral circuit 120 of FIG. 1 may consume large amounts of currentwhen performing a specific operation. In one example, when a highvoltage is generated by charging the plurality of capacitors inside thevoltage pump 220 when the program operation is performed, the largeamount of current may be consumed in the voltage pump 220. In anotherexample, when the bit lines BL are precharged when a read operation isperformed, the large amount of current may be consumed in the read andwrite circuit 123. Thus, the voltage of the power output line PL may beunstable due to the current consumption of the read and write circuit123 and the voltage pump 220.

However, according to an embodiment of the present invention, the firstcurrent compensator 131 may be adjacently disposed to the voltage pump220, and may provide compensation current for the current consumed inthe voltage pump 220. The second current compensator 132 may beadjacently disposed to the read and write circuit 123 and may providecompensation current for the current consumed in the read and writecircuit 123.

Referring to FIG. 4, the peripheral circuit 120 and the currentcompensation circuit 300 may be connected between a first power outputline PL1 and the ground line GND, and between a second power output linePL2 and the ground line GND.

The first power output line PL1 may transmit an internal power voltagegenerated in the internal voltage generation unit 210. The second poweroutput line PL2 may transmit the external power voltage.

The peripheral circuit 120 may operate by using the internal powervoltage transmitted through the first power output line PL1 and theexternal power voltage transmitted through the second power output linePL2. That is, the peripheral circuit 120 may have dual sources forpower. For example, the voltage pump may generate a plurality of highvoltages using the internal power voltage and the external powervoltage. Some of the page buffers within the read and write circuit 123(see FIG. 1) may use the internal power voltages, and the remaining pagebuffers may use the external power voltage.

The current compensation circuit 300 may be configured to providecurrent to the first and second power output lines PL1 and PL2 inresponse to first to fourth compensation control signals CMP11 to CMP14.The current compensation circuit 300 may include first to fourth currentcompensators 310 to 340.

Each current compensator may include an OP-amplifier and a capacitor.The first current compensator 310 may include a first OP-amplifier OPA11connected to the first power output line PL1, and a first capacitor C11connected between the first OP-amplifier OPA11 and the first output linePL1. The first current compensator 310 may provide current to the firstpower output line PL1.

The second current compensator 320 may include a second OP-amplifierOPA12 and a second capacitor C12. An inverse terminal and a non-inverseterminal of the second OP-amplifier OPA12 may be connected to the firstpower output line PL1 and the ground line GND, respectively, and thesecond capacitor C12 may be connected between an output terminal of thesecond OP-amplifier OPA12 and the second power output line PL2. Thesecond current compensator 320 may provide current to the second poweroutput line PL2 in response to the second compensation control signalCMP12. Even though the internal power voltage flowing through the firstpower output line PL1 is applicable due to the generation of the peakcurrent, the voltage of the second power output line PL2 may be stablymaintained.

The third current compensator 330 may include a third OP-amplifier OPA13and a third capacitor C13. An inverse terminal and a non-inverseterminal of the third OP-amplifier OPA13 may be connected to the secondpower output line PL2 and the ground line GND, respectively, and thethird capacitor C13 may be connected between an output terminal of thethird OP-amplifier OPA13 and the first power output line PL1. The thirdcurrent compensator 330 may provide current to the first power outputline PL1 in response to the third compensation control signal CMP13.Even though the external power voltage flowing through the second poweroutput line PL2 is applicable due to the generation of the peak current,the voltage of the first power output line PL1 may be stably maintained.

The fourth current compensator 340 may include a fourth OP-amplifierOPA14 connected to the second power output line PL2, and a fourthcapacitor C14 connected between the fourth OP-amplifier OPA14 and thesecond output line PL2. The fourth compensator 340 may provide currentto the second power output line PL2 in response to the fourthcompensation control signal CMP14.

In FIG. 4, the current compensation circuit 300 may include the first tofourth current compensators 310 to 340. However, the technical spirit ofthe present invention is not limited thereto. The current compensationcircuit 300 may include at least one of the first to fourth currentcompensators 310 to 340.

The first power output line PL1 may transmit the internal power voltagegenerated in the internal voltage generation unit 210, and the secondpower output line PL2 may transmit the external power voltage. However,it will be understood that the technical spirit of the present inventionis not limited thereto. As another example, the internal voltagegeneration unit 210 may generate first and second internal powervoltages having different voltage levels, and the first power outputline PL1 may transmit the first internal power voltage, and the secondpower output line PL2 may transmit the second internal power voltage.

Referring to FIG. 5, when the semiconductor device 100 is operated,current generated in the semiconductor device 100 varies. When currentgenerated in the semiconductor device 100 is larger than a maximumcurrent value Imax, a peak current is generated. In FIG. 5, the peakcurrent may be generated in each of first to fourth time intervals t1 tot4.

When the peak current is generated, the compensation control signal CMPmay be enabled. The compensation control signal CMP is first enabled bya specific time before the time interval in which the peak current isgenerated, and is disabled a specific time after completion of the timeinterval in which the peak current is generated. More particularly, thecompensation control signal CMP is first enabled before the first timeinterval t1 by the specific time ‘a,’ and is disabled the specific time‘a’ after completion of the first time interval t1. Similarly, thecompensation control signal CMP is enabled and disabled for a timecorresponding to each of the second to fourth time intervals t2 to t4.

Referring to FIG. 6, a plurality of program pulses PP1 to PPn and aplurality of program verification pulses VP1 to VPn may be applied tothe word line when a program operation is performed. In order togenerate each program pulse, the voltage pump 220 may consume largeamounts of current. Further, when each program verification pulse isapplied, the voltage pump 220 may consume large amounts of current inorder to generate the program verification pulse, and the read and writecircuit 123 may consume large amounts of current in order to prechargethe bit lines BL.

Accordingly, whenever the program pulse is applied, the generation ofthe peak current may be predicted. Further, whenever the verificationpulse is applied, the generation of the peak current may be predicted.

The control logic (see FIG. 1) may enable the compensation controlsignal CMP for predetermined time intervals. The time intervals in whichthe compensation control signal CMP may be enabled may correspond to thetime intervals in which the generation of the peak current is predicted.The compensation control signal CMP may be enabled before the timeinterval in which the generation of the peak current is predicted by thespecific time ‘a’ (see FIG. 5), and may be disabled after the specifictime ‘a.’

Referring to FIG. 7, at least one of the read pulses RP1 and RP2 may beapplied to the word line. The read pulses may be applied to the wordline selected from among the word lines WL, and pass pulses of a highvoltage may be applied to the non-selected word lines. The voltage pump220 may consume large amounts of current in order to generate the readpulses and the pass pulses, and the read and write circuit 123 mayconsume large amounts of current in order to precharge the bit lines BL.

The control logic 140 (see FIG. 1) may enable the compensation controlsignal CMP for predetermined time intervals when the read operation isperformed. The time intervals in which the compensation control signalCMP is enabled may correspond to the time intervals in which thegeneration of the peak current may be predicted.

According to various embodiments of the present invention, the currentcompensation circuit including an OP-amplifier and a capacitor isprovided. Accordingly, the area of a semiconductor device may decreasedespite demand for additional current.

As described above, various embodiments have been disclosed in thedrawings and the specification. The specific terms used herein are forpurposes of illustration, and do not limit the scope of the presentinvention defined in the claims. Accordingly, those skilled in the artwill appreciate that various modifications and equivalent examples thatmay be made without departing from the scope and spirit of the presentinvention. Therefore, the scope of the present invention will be definedby the technical spirit of the accompanying claims.

What is claimed is:
 1. A semiconductor device, comprising; a peripheralcircuit; a first power output line configured to transmit an externalpower voltage to the peripheral circuit; an internal voltage generationunit configured to generate an internal power voltage by using theexternal power voltage from the first power output line; a second poweroutput line, different from the first output line, configured totransmit the internal power voltage to the peripheral circuit; and afirst current compensator configured to provide a compensation currentto a one of the first and second power output lines such that itsvoltage is stably maintained, the first current compensator including afirst OP-amplifier having a first and second input terminals and a firstoutput terminal, and a capacitor having first and second terminals,wherein the first input terminal is directly coupled to the other one ofthe first and second power output lines, the second input terminal isconnected to a ground line, the first output terminal is connected tothe first terminal, and the second terminal is connected to the one ofthe first and second power output lines.
 2. The semiconductor device ofclaim 1, further comprising a second current compensator including asecond OP-amplifier, the second current compensator including a secondOP-amplifier having a third and fourth input terminals and a secondoutput terminal, and a capacitor having third and fourth terminals,wherein the third input terminal is directly coupled to the one of thefirst and second power output lines, the fourth input terminal isconnected to the ground line, the second output terminal is connected tothe third terminal, and the fourth terminal is connected to the otherone of the first and second power output lines.
 3. The semiconductordevice of claim 2, further comprising: a control logic configured tocontrol the peripheral circuit, wherein the control logic is configuredto enable a first and second compensation control signals for apredetermined time interval, wherein the first and second OP-amplifiersare activated according to the first and second compensation controlsignals, respectively.
 4. The semiconductor device of claim 1, furthercomprising: a third current compensator including a third OP-amplifierconnected to the first power output line and a third capacitor connectedbetween an output terminal of the third OP-amplifier and the first poweroutput line; and a fourth current compensator including a fourthOP-amplifier connected to the second power output line and a fourthcapacitor connected between an output terminal of the fourthOP-amplifier and the second power output line.
 5. The semiconductordevice of claim 4, further comprising: a control logic configured tocontrol the peripheral circuit, wherein the control logic is configuredto enable a first, third, and fourth compensation control signals for apredetermined time interval, wherein the first, third, and fourthOP-amplifiers are activated according to the first, third, and fourthcompensation control signals.
 6. The semiconductor device of claim 1,further comprising a memory cell array driven by the peripheral circuit,wherein the peripheral circuit comprises: a read and write circuitconnected to the memory cell array through bit lines and operated byusing the external power voltage and the internal power voltage receivedthrough the first and second power output lines, respectively; a voltagepump configured to generate high voltages by using the external powervoltage and the internal power voltage received through the first andsecond power output lines; an address decoder connected to the memorycell array through word lines and configured to switch the high voltagesto the word lines.
 7. The semiconductor device of claim 6, wherein thefirst current compensator is adjacently disposed to the voltage pump. 8.The semiconductor device of claim 6, wherein the first currentcompensator is adjacently disposed to the read and write circuit.